Fabrication Of Microstructures

Authors

  • Darwin Rodríguez P.
  • Alejandro Godoy
  • Ruy Bonilla
  • Alba G Avila B

Keywords:

Planar coils, photo-reduced camera, transparency photo-mask, education

Abstract

One of the education challenges in microelectronics is to convey students the basic steps for electronic devices fabrication. This article introduces how rapid  rototyping of planar coils combines photo-mask fabrication, photolithography and wet etching, and how it can be used for training at the undergraduate level. Low cost photo-masks are generated using printing master layouts of coil patterns designed with Inkscape and Adobe InDesign and transferred onto a photographic KODAK paper using a DeVere reduction copy camera. Three parameters are analyzed for transferring the layout onto the photomask and then onto an Al substrate: the camera’s reduction factor, the grain size of the Kodak paper and the quality of the InkJet photo-printer. Fabrication of submicron aluminum coils is achieved with optimization of these parameters. The hands-on experience on device fabrication impacts the students’ ability to comprehend
interactions between mask designs, fabrication and devices layout.

Author Biographies

  • Darwin Rodríguez P.

    Rodríguez P. Darwin: Project Manager in nanotechnology at SENA (Servicio Nacional de Aprendizaje), Tecno Academias; Tecno Parques and Centros de Formación. Mr. Rodriguez is MSc in electronic and computing science with micro and nanotechnology emphasis at Universidad de los Andes, Bogotá Colombia. Throughout his career, he has worked in materials characterization using Atomic force microscopy, Scanning electron microscopy and fluorescence optical microscopy; also he has developed micro and nanofabrication techniques using Nanolithography platform, photolithography and soft lithography by PDMS.

  • Alejandro Godoy

    Godoy, Alejandro: BSc Electronic engineering, expect graduation date August 2012.

  • Ruy Bonilla

    Bonilla, Ruy: M.S from Cambridge University currently, He is a PhD student at Oxford University. His research interest includes SPM characterization and Photovoltaic.

  • Alba G Avila B

    Avila B, Alba G: PhD degree In Physics from Cambridge University, England.

    Currently, she is an associate Professor at the Department of Electrical and Electronic Engineering,  Universidad de los Andes. She was a visitor professor and scholar at The Semiconductor Research Corporation in 2005 and 2011-2012, National Taiwan University, Taipei in 2004, Cambridge University in 2007, Cornell University in 2008, Ohio State University in 2009, National Center of Microelectronics in 2010. She has won several awards IANAS fellowship in 2012, named one of Ten Outstanding Young Persons of World, Juniour Chamber International Colombian Chapter., 2005, Recipient of the Otto de Greiff Award for
    Best Thesis in Physics in 1996, Science and Art Foundation junior award, Mazda 1998. She is founder of the Colombian micro and nanotechnology conferences and the science and Engineering women workshop.
    Her interests are in thermal and electrical properties at nano scale, electrical characterization of nanostructures based on AFM and STM, NEMs and Synthesis and characterization of nanocomposite materials.

References

International Technology Roadmap for Semiconductors, (2012) http:// www.itrs.net/

John Wade, (1983). “Special Effects in the Camera”, Focal Press.

Kodak Polychrome Graphics, (2001) KODALITH Ortho Films 2556, 6556, Type 3.

Benjamin G. Eynon, Banqiu Wu. Photomask, (2005). “Fabrication technology”. McGraw-Hill.

DEVERE. 480 Copy Camera. Assembly, Installation, (2005), “Operation and Maintenance Instructions”.

Dixson, R. G.; Potzick, J. E.; Orji, N. G. (2008). “Re-calibration of the NIST SRM 2059 Master Standard using Traceable Atomic Force Microscope Metrology”.

Tipler P. Mosca G. (2004). “Properties of Light”.

Mikhail Polyanskiy. (2008). “Refrective Index Database”. http://refractiveindex.info.

Rai-Choudhury P., (1997). “Handbook of microlithography”, micromachining and microfabrication, Vol 1. IET.

Franssila S. 2010. “Introduction to Microfabrication.”

Alejandro Godoy, Alba Graciela Avila Bernal, (2011). “Fabricación de Máscaras para Procesos de Fotolitografía Usados en Procesos de Microelectrónica y Fabricación MEMS, Usando la Cámara Copiadora DeVere 480”, documento interno, Universidad de los Andes.

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Published

2012-12-20

Issue

Vol. 6 No. 12 (2012)

Section

Artículos

How to Cite

Fabrication Of Microstructures. (2012). Entre Ciencia E ingeniería, 6(12), 14-18. https://ojs.ucp.edu.co/index.php/entrecienciaeingenieria/article/view/645